An orthogonal magnetic field and electric field are added between the sputtering target electrode (cathode) and anode to fill the required inert gas (usually Ar gas) in the high vacuum chamber.

The target material of coating is the sputtering source which forms various functional films on the substrate by magnetron sputtering, multi arc ion plating or other types of coating system under appropriate technological conditions.

Health hazard There is no report of zirconium poisoning in industry.

Zirconium can absorb nitrogen, hydrogen, oxygen and other gases as strongly as lithium and titanium.

The zircon was calcined and transformed into zirconium tetrachloride.

Zirconium is a chemical element, its chemical symbol is Zr, its atomic number is 40, it is a high melting point metal, light gray.